Full Title Eximer Laser — a Universal Instrument For Investigations in Microelectronics, Photochemistry, X-Ray Spectroscopy and Other Sciences Tech Area / Field

PHY-OPL: Physics / Optics and Lasers

CHE-RAD: Chemistry / Photo and Radiation Chemistry

INF-ELE: Information and Communications / Microelectronics and Optoelectronics

Brief Description of Technology
Lasers based on eximer molecules that generate a radiation wavelenth range of 190-350 nm are developed and produced by a number of companies. This is due to the fact that the lasers’ parameters (radiation spectrum, average power, pulse energy) make them attractive for many applications in microelectronics, photochemistry and generation of x-ray radiation. However, the complexities and difficulties caused by their service impede their competition when compared to garnet lasers with frequency conversion.

Analysis of published data and our own experiences show that the greatest difficulties are due to the brief time of inversion existence in an eximer laser. This makes it necessary to use complicated schemes of the generation spectrum selection. An essential disadvantage of eximer lasers is the requirement of a regular change of operating gases and considerable sizes (small stored energy in an active medium).

An eximer laser has been developed in IAP RAS in which the mentioned disadvantages are eliminated, or greatly diminished.

The laboratory laser model has the following parameters: a wavelenth of 308 nm, a pulse duration varying from 1-40 ns for the spectrum width of 0.02 cm^-1, a divergence close to the diffraction, and an output energy of 0.1 J.

When the spectrum width grows to 1 cm^-1, the pulse duration can be increased to 200 ns. It is planned in the near future to raise the energy output to 1 J. For the given radiation parameters, the laser has high stability.

By employing special technology in the discharge electrode preparation, we managed to decrease the longitudinal sizes of amplifying moduli to 0.4 m instead of the conventional 1 m, which permitted us to diminish the laser sizes and reduce the active mixture consumption.
The setup also included a dye laser with eximer laser pump. The output radiation wavelength of this attachment (adapter) can vary from 350-800 nm.

Legal Aspects
Patents were not sought.

Special Facilities in Use and Their Specifications
None.

Scientific Papers
Nikolay I.Polushkin, S.A.Gusev, M.N.Drozdov, Yu.K.Verevkin, V.N.Petryakov., “Arrays of magnetic wires created in phase separating Fe-containing alloys by interference laser irradiation,” J.Appl.Phys. v.81, N 8, pp.1-3 (1997).

Yu.K.Verevkin, E.Ya.Daume, V.N.Petryakov, A.D.Tertyshnik, “The use of SMBS in xenon for compensating the distortions of the radiation space structure in XeCl gas-discharge plasma,” Proceedings SPIE. Phase Conjugation and Adaptive Optics v.2771, pp.22-27 (1995).

Дата добавления: 2015-07-20